Supplier and Service Agent for
Industrial Equipment Made in Europe.

36 Street no. 2, Quarter 2
An Phu Ward, Thu Duc City
Ho Chi Minh City, Vietnam

Tel.: +84 (0)28 5402 9002
Fax: +84 (0)28 5402 9004

eMail: info@huynhbang.com

Multi-Parameter Mass Flow Meters & Mass Flow Controllers for Gases

The d·flux multi series is a fast and reliable multi-parameter mass flow meter for gases with measurement outputs for mass, volumetric and normalized flow, pressure and temperature. One of the many advantages of this laminar flow meter is the ability to easily switch to a different gas without a loss in accuracy.

PDF Datasheet

CORE FEATURES

√Meter and Controller

√ Flow rates up yo 1400 ln/min

√ Multiple pre-programmed gasses

√ State-of-the-art communication

√ Wide application scope IP54

√ Wireless device access with the free Vögtlin Connect app

√ Alarm, warning and diagnostic features

√ High accuracy, sample rate and fast response

√ Minimum Inlet required

√ Custome application profiles

√ Introduction Vögtlin  Automated Dunamics VADy®


Technical Specifications d⋅flux multi series

MEASURING RANGES

Standard ranges
(air / user adjustable)¹

LFE1400 from 0-1000 ln/min to 0-1400 ln/min
LFE1000 from 0-700 ln/min to 0-1000 ln/min
LFE700 from 0-500 ln/min to 0-700 ln/min
LFE500 from 0-350 ln/min to 0-500 ln/min

GASES

MAX. BEREICH

CORE

PRIME

PRIME H2

Air

0-1400 ln/min

N2

0-1400 ln/min

Ar

0-1240 ln/min

He

0-1400 ln/min

CO2

0-740 In/min

CO

0-1390 In/min

H2

0-2900 In/min

Above are the default gases pre-programmed for each sensor. More gases can be added as options.²

 

¹ Unless clearly stated, the specified flow ranges are for an equivalent flow of air at 1013.25 mbar a (760 mmHg) and 0 °C
(32 °F). Other common flow, temperature and pressure units can be selected through the Vögtlin Connect app or the
digital communication interface. More information available in the d·flux multi operating instructions.
² Additional gases or gas mixtures can be added to the above standard list. Maximum you can store up to 15 gases per
unit. Stored gases can be replaced by another gas or gas mixture (except for air). Programmed gases/mixtures can be
selected through the Vögtlin Connect app or the digital communication interface.
For other gases, gas mixtures and reference conditions please contact the factory. Only suitable for dry and clean gases.

PROFILES

Customer defined profiles

Up to 15 user programmable profiles Profiles are preset configurations where the customer can set the gas, range, dynamics, totalizers, engineering units and reference conditions for up to 15 different applications 

PERFORMANCE DATA

Accuracy

A1 Core: ± 0.5% of user full scale ± 1% of measured value.
B1 Prime : ± 0.3% of user full scale ± 0.7% of measured value.
B2 Prime high accuracy: ± 0.3% of user full scale ± 0.5% of measured value.
Coming soon (Hydrogen applications):
B3 Prime H2: ± 0.3% of user full scale ± 0.7% of measured value.
B4 Prime H2 high accuracy : ± 0.3% of user full scale ± 0.5% of measured value.
User full scale = ~70…100% standard range.

Media

All gases and gas mixtures that are compatible with the selected materials and for which data is
available in the NIST refprop database.
Contact the factory for more information.

Dynamic range

Fixed dynamics: 1 : 100 for most gases* VADy® dynamics: up to 1 : 1000 (available for meter only) VADy® or a fixed dynamic range can be selected during order process.
This setting can be changed at any time using the Vögtlin Connect app.
*The dynamic range is gas and pressure dependent, higher pressures means lower dynamic range.

Response time

Meter: 120 msec / Controller: 2000 msec (according to SEMI standard SEMI E17-1011)*
Update time mass flow value: 10 msec / Sensor sample rate: 1 msec
*With optimized filter settings. All filter modes and values can be set through the Vögtlin Connect app or the digital communication interface.

Repeatability

± 0.2% of factory full scale (according to SEMI standard E56-0309)

Longterm stability

Typical < 0.2% of measured value / year after tare

Power supply

Meter: 15-36 Vdc, (200 mA@24Vdc, regulated) / Controller: 24 Vdc ±10%, (2000mA@24Vdc, regulated)
Power in through M8-4P connection or optionally through D-sub connection
(ripple should not exceed 100 mV peak-to-peak) We recommend that the body of this unit is properly connected to ground

Operation pressure

1  to 14 bar a

Temperature (environment/gas)

-20 to +60 °C (-4 to 140 °F)

Humidity gas

0-95% Rh (non-condensing)

Pressure sensitivity

Prime and Prime H2 sensor: <0.05% factory full scale per bar (typical air).
Core sensor: <0.08% of factory full scale + 0.1% of measured value per bar (typical air).

Temperature sensitivity

<0.02% FFS* per 1 °C of inlet gas temperature @ 7 bar a pressure
*Factory Full Scale (maximum flow range of the device)

Accuracy temperature

Typically ± 0.5 °C (not certified)

Accuracy absolute pressure

<0.5% MV (not certified)

Warm-up time

<2 sec for full accuracy

MATERIALS

Wetted parts

Elastomers: available now : FKM, EPDM (Meter only). EPDM (Controller, coming in 2023),
FFKM Valve seat (coming in 2023). Full FFKM version (on request).
Body: Stainless-steel 316L (1.4404).
Valve (controller): 316 (1.4401), 416 (1.4005), 430F (1.4104).
Inlet filter: Stainless-steel 316 (1.4401), fastening stainless-steel (1.4122) or equivalent.
A1 core sensor: Stainless-steel 316Ti (1.4571), silicon, gold, glass, silicone encapsulation, PBT.
30GF, ceramics. B1 Prime sensor: Stainless-steel 316L (1.4404).
B2 Prime H2 sensor: Stainless-steel 316L (1.4404) with gold coating.

Electronic housing

Powder coated stainless steel

Integrated inlet filter

50 Micron SS316 (1.4401) filter / not customer replaceable/ fastener material SS (1.4122)

Wetted part surface roughness

1.6 Ra µm or better (contact factory for lower Ra values)

INTEGRATION & INSTALLATION

Output signals analog

Linear 4–20 mA or customer defined (max 20 mA) user selectable
Linear 0–5 VDC or 0-10 VDC or customer defined (max 10 Volt) user selectable
mA output: 740 ohms maximum load resistance
Volt output: 1000 ohms minimum load resistance
All analog outputs are galvanically separated and protected. If used with analog signals add 0.2% of FFS to the uncertainty

Setpoint signals analog

Linear 4–20 mA or customer defined (max 20 mA) user selectable
Linear 0–5 VDC or 0-10 VDC or customer defined (max 10 Volt) user selectable

Output signals digital

RS-485 (Modbus RTU 2-wire)
The Modbus address can be set with 2 rotating switches on the outside of the housing.
All Modbus settings can be set through the Vögtlin Connect app.

Optional Profinet or EtherCAT

Dual Port RJ45 with integrated switch (easy to daisy chain)
RJ45 LEDs indicating link and activity on the network / Ethernet speed: maximum 100 Mbit
ProfiNet: PROFINET IO specification v2.33 / PROFINET IO devices conformance class B (RT) / Endianness: conform Siemens S7 (big)
EtherCAT: IEC standard IEC61158 / Endianness: little
Ethernet IP will be available end of 2023.

Configuration interface

Wireless Vögtlin Connect app available from Google Play store

Output I/O mosfet

On/off for external shut-off valve or alarm available through M8-4P connector
Contact type: mosfet transistor
Maximum voltage: 36 Vdc, Max current 500 mA (Polyfuse protected)

Electrical connection

9 pin D-sub male (power and signals) M8-4P connector (open collector output + power)
Optional 2 x RJ45 (EtherCAT / Profinet)

Process connection

1″ BSPP female (1″G)
Optional ½” BSPP, 1″ Compression or Tri-clamp 50.5mm flange size (ISO) (see accessories tab)

Inlet section

None required if our standard inlet filter / conditioner is installed
Without filter / conditioner a 10 D straight inlet is recommended
The inlet filter can be deselected at time of order

Pressure drop

Meter: Standard 400 mbar at factory full scale air venting to atmosphere (with filter / conditioner)
Optional: 325 mbar at factory full scale air venting to atmosphere (without filter / conditioner)
Pressure drop is dependent on operating pressure (higher pressure = lower pressure drop)
For more information please refer to your sales partner
Controller: Min. pressure difference required for 1400 ln/min (air) < 2 bar
Contact your sales partner for other pressure drop requirements

Mounting orientation

All orientations are possible

Weight

Meter: 3.7 kg / Controller: 8.7 kg (excluding ethernet and fittings)

SAFETY

Test pressure after production

28 bar a

Maximum overpressure sensor

Core Sensor: 28 bar a, Prime and Prime H2 Sensor: 90 bar a

Burst pressure 

Meter: 100 bar a / Controller: 70 bar a

Leak rate

< 1 x 10-6 mbar l/s He

Ingress protection class

IP54 if IP54-D-sub is used (see accessories tab)
For optional EtherCAT/Profinet: IP40

CERTIFICATIONS

EMC

IEC/EN 61326-1, IEC/EN 61000-6-2/4

ATEX certification

None

Material certificates

To be released in 2023 (available for meter only)

FDA compliance

To be released in 2023 (available for meter only)

PED

Fully compliant. Since the unit has 1″ process connection, complies with the SEP as defined in article 4, paragraph 3 of the Pressure Equipment Directive (PED) (2014/68/EU)

RoHS / REACH

All components comply with Directive 2002/95/EC (RoHS) and the REACH guidelines

Warranty

3 years, except when using certain corrosive / dangerous gases (HCL, CL2, F2, H2S, SO2)

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