36 Street no. 2, Quarter 2 Tel.: +84 (0)28 5402 9002 eMail: info@huynhbang.com |
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Multi-Parameter Mass Flow Meters & Mass Flow Controllers for Gases
The d·flux multi series is a fast and reliable multi-parameter mass flow meter for gases with measurement outputs for mass, volumetric and normalized flow, pressure and temperature. One of the many advantages of this laminar flow meter is the ability to easily switch to a different gas without a loss in accuracy.
CORE FEATURES
√Meter and Controller
√ Flow rates up yo 1400 ln/min
√ Multiple pre-programmed gasses
√ State-of-the-art communication
√ Wide application scope IP54
√ Wireless device access with the free Vögtlin Connect app
√ Alarm, warning and diagnostic features
√ High accuracy, sample rate and fast response
√ Minimum Inlet required
√ Custome application profiles
√ Introduction Vögtlin Automated Dunamics VADy®
Technical Specifications d⋅flux multi series
MEASURING RANGES | |
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Standard ranges | LFE1400 from 0-1000 ln/min to 0-1400 ln/min |
GASES | MAX. BEREICH | CORE | PRIME | PRIME H2 |
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Air | 0-1400 ln/min | ✓ | ✓ | ✓ |
N2 | 0-1400 ln/min | ✓ | ✓ | ✓ |
Ar | 0-1240 ln/min | ✓ | ✓ | ✓ |
He | 0-1400 ln/min | ✓ | ✓ | |
CO2 | 0-740 In/min | ✓ | ✓ | |
CO | 0-1390 In/min | ✓ | ✓ | |
H2 | 0-2900 In/min | ✓ |
Above are the default gases pre-programmed for each sensor. More gases can be added as options.²
¹ Unless clearly stated, the specified flow ranges are for an equivalent flow of air at 1013.25 mbar a (760 mmHg) and 0 °C
(32 °F). Other common flow, temperature and pressure units can be selected through the Vögtlin Connect app or the
digital communication interface. More information available in the d·flux multi operating instructions.
² Additional gases or gas mixtures can be added to the above standard list. Maximum you can store up to 15 gases per
unit. Stored gases can be replaced by another gas or gas mixture (except for air). Programmed gases/mixtures can be
selected through the Vögtlin Connect app or the digital communication interface.
For other gases, gas mixtures and reference conditions please contact the factory. Only suitable for dry and clean gases.
PROFILES | |
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Customer defined profiles | Up to 15 user programmable profiles Profiles are preset configurations where the customer can set the gas, range, dynamics, totalizers, engineering units and reference conditions for up to 15 different applications |
PERFORMANCE DATA | |
Accuracy | A1 Core: ± 0.5% of user full scale ± 1% of measured value. |
Media | All gases and gas mixtures that are compatible with the selected materials and for which data is |
Dynamic range | Fixed dynamics: 1 : 100 for most gases* VADy® dynamics: up to 1 : 1000 (available for meter only) VADy® or a fixed dynamic range can be selected during order process. |
Response time | Meter: 120 msec / Controller: 2000 msec (according to SEMI standard SEMI E17-1011)* |
Repeatability | ± 0.2% of factory full scale (according to SEMI standard E56-0309) |
Longterm stability | Typical < 0.2% of measured value / year after tare |
Power supply | Meter: 15-36 Vdc, (200 mA@24Vdc, regulated) / Controller: 24 Vdc ±10%, (2000mA@24Vdc, regulated) |
Operation pressure | 1 to 14 bar a |
Temperature (environment/gas) | -20 to +60 °C (-4 to 140 °F) |
Humidity gas | 0-95% Rh (non-condensing) |
Pressure sensitivity | Prime and Prime H2 sensor: <0.05% factory full scale per bar (typical air). |
Temperature sensitivity | <0.02% FFS* per 1 °C of inlet gas temperature @ 7 bar a pressure |
Accuracy temperature | Typically ± 0.5 °C (not certified) |
Accuracy absolute pressure | <0.5% MV (not certified) |
Warm-up time | <2 sec for full accuracy |
MATERIALS | |
Wetted parts | Elastomers: available now : FKM, EPDM (Meter only). EPDM (Controller, coming in 2023), |
Electronic housing | Powder coated stainless steel |
Integrated inlet filter | 50 Micron SS316 (1.4401) filter / not customer replaceable/ fastener material SS (1.4122) |
Wetted part surface roughness | 1.6 Ra µm or better (contact factory for lower Ra values) |
INTEGRATION & INSTALLATION | |
Output signals analog | Linear 4–20 mA or customer defined (max 20 mA) user selectable |
Setpoint signals analog | Linear 4–20 mA or customer defined (max 20 mA) user selectable |
Output signals digital | RS-485 (Modbus RTU 2-wire) |
Optional Profinet or EtherCAT | Dual Port RJ45 with integrated switch (easy to daisy chain) |
Configuration interface | Wireless Vögtlin Connect app available from Google Play store |
Output I/O mosfet | On/off for external shut-off valve or alarm available through M8-4P connector |
Electrical connection | 9 pin D-sub male (power and signals) M8-4P connector (open collector output + power) |
Process connection | 1″ BSPP female (1″G) |
Inlet section | None required if our standard inlet filter / conditioner is installed |
Pressure drop | Meter: Standard 400 mbar at factory full scale air venting to atmosphere (with filter / conditioner) |
Mounting orientation | All orientations are possible |
Weight | Meter: 3.7 kg / Controller: 8.7 kg (excluding ethernet and fittings) |
SAFETY | |
Test pressure after production | 28 bar a |
Maximum overpressure sensor | Core Sensor: 28 bar a, Prime and Prime H2 Sensor: 90 bar a |
Burst pressure | Meter: 100 bar a / Controller: 70 bar a |
Leak rate | < 1 x 10-6 mbar l/s He |
Ingress protection class | IP54 if IP54-D-sub is used (see accessories tab) |
CERTIFICATIONS | |
EMC | IEC/EN 61326-1, IEC/EN 61000-6-2/4 |
ATEX certification | None |
Material certificates | To be released in 2023 (available for meter only) |
FDA compliance | To be released in 2023 (available for meter only) |
PED | Fully compliant. Since the unit has 1″ process connection, complies with the SEP as defined in article 4, paragraph 3 of the Pressure Equipment Directive (PED) (2014/68/EU) |
RoHS / REACH | All components comply with Directive 2002/95/EC (RoHS) and the REACH guidelines |
Warranty | 3 years, except when using certain corrosive / dangerous gases (HCL, CL2, F2, H2S, SO2) |