Air/Full scale freely selectable

Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM)
Body size ½” from 0 … 60 ln/min to 0 … 450 ln/min (from 0 … 65 SLPM to 0 … 480 SLPM)

“Standard”
The economic solution

Accuracy: ± 1.0% of full scale*
Turndown ratio: 1 : 50

“Hi-Performance”
With highest accuracy and turndown ratio
(available for GIM < 200 ln/min (200 SLPM) /
GIC < 150 ln/min (150 SLPM) (air))

Accuracy: ± 0.3% of full scale + ± 0.5% of reading*
Turndown ratio: 1 : 100
*An additional error of ±0.25% may apply for analogue signals

Media (real gas calibration)

Air, O2*, N2*, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request)
*O2 & N2 are calibrated with air

Response time

Meter (GIM): ± 80ms*; Controller (GIC): ± 500ms*
*depending on device configuration & according to SEMI standard E17-1011,
5-100% of range under optimized conditions

Repeatability

± 0.2% of full scale (according to SEMI standard E56-0309)

Longterm stability

< 1% of measured value / year

Power supply

24 Vdc (18 – 30 Vdc), 15 Vdc on request

Current consumption Standard

Meter (GIM): max. 100 mA; Controller (GIC): max. 250 mA
(GIC with valve type 8 max. 490mA)

Current consumption
Profinet RT / EtherCAT

Meter (GIM): max. 125 mA; Controller (GIC): max. 340 mA
(GIC with valve type 8 max. 560mA)

Operation pressure

0.2 – 11 bara (3 – 160 psia) / GIC with valve type 4.5 and 8: max. 8 bara (120 psia)

Temperature (environment/gas)

0 – 50°C (32 – 122°F)

Pressure sensitivity

<0.2% / bar (<0.014% / psi) of reading (typical N2)

Temperature sensitivity

<0.025% FS measuring range type per 1°C (<0.012% per 1°F)

Warm-up time

< 1 sec. for full accuracy

Body Materials

Stainless steel 316L (see operating instructions for wetted parts)

Electronic Housing

Aluminum

Seals

EPDM (FDA), optional FKM and FFKM

Output signals analog

0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V

Output signals digital

RS-485; Modbus RTU (Slave); LabView-VIs available / option: Profibus DP-V0, DP-V1

Process connection

G¼” (BSPP* female) up to 60 ln/min (64 SLPM)
G½” (BSPP* female) up to 450 ln/min (480 SLPM)
*British Standard Pipe Parallel

Inlet section

None required

Electrical connection

Cable gland with compression fitting / Option: M12 plug (DIN-standard)
(both connection IP67 protected)

Mounting orientation

All orientations are possible. We recommend horizontal mounting.
Please contact the manufacturer for further information.

Test pressure

16 bara (240 psia)

Leak rate

< 1 x 10-6 mbar l/s He

Ingress protection class

IP67 (conforms to NEMA 6)

EMC

EN 61326-1

ATEX Certification

II 3G nA IIC T4 Gc (Category 3 / Zone 2)
II 3D Ex tc IIIC T100°C Dc (Category 3 / Zone 22)