d·flux multi series

Multi-Parameter Mass Flow Meter & Mass Flow Controller for Gases

The d·flux multi series is a fast and reliable multi-parameter mass flow meter for gases with measurement outputs for mass, volumetric and normalized flow, pressure and temperature. One of the many advantages of this laminar flow meter is the ability to easily switch to a different gas without a loss in accuracy.

PDF Datasheet

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Meter and Controller

The unit is available as meter or with a strong integrated control valve as controller.

 

State-of-the-art communication

Advanced Modbus communication & analog output. Optional Profinet or EtherCAT interface available (Ethernet IP available soon)

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Wireless device access with the free Vögtlin Connect app

Easy device access and configuration of many parameters with our free Android app (Bluetooth®).

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Flow rates up to 1400 ln/min

Rate for air, other gases according to conversion (for instance hydrogen: up to 2900 ln/min).

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Custom application profiles

The unit offers up to 15 application profiles, which allow the storage of individual application details like flow rate, gas, PID, etc. Every profile has an individual totalizer

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Wide choice in materials

The units are available in aluminium (economical and light) and stainless-steel (all wetted parts). Elastomers are available in FKM, EPDM or FFKM. For hydrogen applications, we can supply a gold coated pressure sensor.

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5 different sensor options

Our core sensor is an economical solution for air, nitrogen, oxygen and argon. Our prime sensor is suitable for all gases and has an high accuracy option. For hydrogen we recommend our gold-plated prime sensor./p>

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Wide application scope IP54

Suitable up to 14 bar a and from -20 to 60 °C. Body in stainless-steel or aluminium Protection IP54.

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Minimum inlet required

Compact design, requires no long straight or special inlet and outlet sections.

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High accuracy, sample rate and fast response

Up to ± 0.3% user full scale and ± 0.5% of measured value.

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High sample rate and fast response

Sample rate of 1 ms, updated data every 10 msec and a total response time of 120 msec (controller 2s).

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Custom application profiles

The unit offers up to 15 application profiles, which allow the storage of individual application details like flow rate, gas, PID, etc. Every profile has an individual totalizer

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Alarm, warning and diagnostic features

The d·flux multi series integrates advanced diagnostics, monitoring and reporting every part of its operation. The information is accessible via Vögtlin Connect app or Modbus

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Autotare

To minimize uncertainty, the d·flux multi controller detects with an advanced algorithm when there is no flow and will then automatically zero (tare) for the unit optimum performance. For the meter this optimization needs to be performed manually.

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Vögtlin Flow Studio Software

You can communicate to the d·flux in a Microsoft Windows environment through Modbus. To make this simple, we supply our free software. Easy to install, configure the unit and discover useful options such as graphs and data collection.

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d·flux multi meter DFM
  • Multi-parameter mass flow meter
  • Flow rate up to 1400 ln/min for air
  • Anodised aluminium or stainless steel 316L (1.4404)
  • Modbus communication & analogue signals
  • FKM, EPDM or FFKM elastomers
  • Modbus and analogue output
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d·flux multi controller DFC
  • Multi-parameter mass flow meter
  • Flow up to 1400 ln/min for air
  • Anodized aluminium or stainless steel 316L (1.4404)
  • FKM, EPDM or FFKM elastomers
  • Modbus & analog output
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Analogue and digital interfaces
  • The devices have Modbus and analogue output as standard.
  • Interfaces for the Ethernet protocols PROFINET & EtherCAT are optionally available (EtherNet/IP™ coming soon).
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Measuring ranges

Standard ranges
(air / user adjustable)
  • LFE1400 from 0-1000 ln/min to 0-1400 ln/min
  • LFE1000 from 0-700 ln/min to 0-1000 ln/min
  • LFE700 from 0-500 ln/min to 0-700 ln/min
  • LFE500 from 0-350 ln/min to 0-500 ln/min

Gases

Max. range

Core

Prime

Prime H2

Air 0-1400 ln/min
N2 0-1400 ln/min
Ar 0-1240 ln/min
O2 0-1400 ln/min
He 0-1400 ln/min  
CO2 0-740 ln/min  
CO 0-1390 ln/min  
H2 0-2900 ln/min    
 

Profiles

Customer defined profiles
  • Up to 15 user programmable profiles Profiles are preset configurations where the customer can set the gas, range, dynamics, totalizers, engineering units and reference conditions for up to 15 different applications
 

Performance Data

Accuracy
  • A1 Core: ± 0.5% of user full scale ± 1% of measured value.
  • B1 Prime: ± 0.3% of user full scale ± 0.7% of measured value.
  • B2 Prime high accuracy: ± 0.3% of user full scale ± 0.5% of measured value.
  • For hydrogen applications:
  • B3 Prime H2: ± 0.3% of user full scale ± 0.7% of measured value.
  • B4 Prime H2 high accuracy: ± 0.3% of user full scale ± 0.5% of measured value.
  • User full scale = ~70…100% standard range.
Media
  • All gases and gas mixtures that are compatible with the selected materials and for which data is available in the NIST refprop database.
  • Contact the factory for more information.
Dynamic range
  • Fixed dynamics: 1 : 100 for most gases* VADy® dynamics: up to 1 : 1000 (available for meter only) VADy® or a fixed dynamic range can be selected during order process.
  • This setting can be changed at any time using the Vögtlin Connect app.
Response time
  • Meter: 120 msec / Controller: 2000 msec (according to SEMI standard SEMI E17-1011)*
  • Update time mass flow value: 10 msec / Sensor sample rate: 1 msec
Repeatability
  • ± 0.2% of factory full scale (according to SEMI standard E56-0309)
Longterm stability
  • Typical < 0.2% of measured value / year after tare
Power supply
  • Meter: 15-36 Vdc, (200 mA@24Vdc, regulated) / Controller: 24 Vdc ±10%, (2000 mA@24Vdc, regulated)
  • Power in through M8-4P connection or optionally through D-sub connection
Operation pressure
  • 1  to 14 bar a
Temperature (environment/gas)
  • -20 to +60 °C (-4 to 140 °F)
Humidity gas
  • 0-95% Rh (non-condensing)
Pressure sensitivity
  • Prime and Prime H2 sensor: <0.05% factory full scale per bar (typical air).
  • Core sensor: <0.08% of factory full scale + 0.1% of measured value per bar (typical air).
Temperature sensitivity
  • <0.02% FFS* per 1 °C of inlet gas temperature @ 7 bar a pressure
Accuracy temperature
  • Typically ± 0.5 °C (not certified)
Accuracy absolute pressure
  • <0.5% MV (not certified)
Warm-up time
  • <2 sec for full accuracy
 

Materials

Wetted parts
  • Elastomers: FKM, EPDM, FFKM (valve seat). Full FFKM version upon request.
  • Body: Stainless-steel 316L (1.4404).
  • Valve (controller): 316 (1.4401), 416 (1.4005), 430F (1.4104).
  • Inlet filter: Stainless-steel 316 (1.4401), fastening stainless-steel (1.4122) or equivalent.
  • A1 core sensor: Stainless-steel 316Ti (1.4571), silicon, gold, glass, silicone encapsulation, PBT. 30GF, ceramics.
  • B1 + B2 Prime sensor: Stainless-steel 316L (1.4404).
  • B3 + B4 Prime H2 sensor: Stainless-steel 316L (1.4404) with gold coating.
Electronic housing
  • Powder coated stainless steel
Integrated inlet filter
  • 50 micron SS316 (1.4401) filter.
  • Fastener filter material stainless-steel (1.4122) or equivalent.
Wetted part surface roughness 1.6 Ra µm or better (contact factory for lower Ra values)
 

Integration & Installation

Output signals analog
  • Linear 4–20 mA or customer defined (max 20 mA), user selectable
  • Linear 0–5 Vdc or 0-10 Vdc or customer defined (max 10 Vdc), user selectable
  • mA output: 740 ohms maximum load resistance
  • Volt output: 1000 ohms minimum load resistance
  • All analog outputs are galvanically separated and protected. If used with analog signals add + as before 0.2% of FFS to the uncertainty
Setpoint signals analog
  • Linear 4–20 mA or customer defined, (max 20 mA) user selectable
  • Linear 0–5 Vdc or 0-10 Vdc or customer defined, (max 10 Vdc) user selectable
Output signals digital
  • RS-485 (Modbus RTU 2-wire)
  • The Modbus address can be set with 2 rotary switches on the outside of the housing.
  • All Modbus settings can be set through the Vögtlin Connect app.
Optional Profinet or EtherCAT
  • Dual port RJ45 with integrated switch (easy to daisy chain)
  • RJ45 LEDs indicating link and activity on the network / Ethernet speed: maximum 100 Mbit
  • ProfiNet: PROFINET IO specification v2.33 / PROFINET IO devices conformance class B (RT) / Endianness: conform Siemens S7 (big)
  • EtherCAT: IEC standard IEC61158 / Endianness: little
  • EtherNet/IP™ coming soon.
Configuration interface
  • Wireless Vögtlin Connect app available from Google Play store
Output I/O MOSFET
  • On/off for external shut-off valve or alarm available through M8-4P connector
  • Contact type: MOSFET (open drain/collector)
  • Maximum voltage: 36 Vdc, Max current 500 mA (Polyfuse protected)
Electrical connection
  • 9-pin D-sub male (power and signals) and M8-4P connector (Power + I/O MOSFET output)
  • Optional 2 x RJ45 (EtherCAT / Profinet)
Process connection
  • 1″ BSPP female (1″G)
  • Optional ½” BSPP, 1″ Compression or Tri-clamp 50.5mm flange size (ISO) (see accessories tab)
Inlet section
  • None required if our standard inlet filter / conditioner is installed
  • Without filter / conditioner a 10 D straight inlet is recommended
  • The inlet filter can be deselected at time of order
Pressure drop
  • Meter: Standard 400 mbar at factory full scale air venting to atmosphere (with filter / conditioner)
  • Optional: 325 mbar at factory full scale air venting to atmosphere (without filter / conditioner)
  • Pressure drop is dependent on operating pressure (higher pressure = lower pressure drop)
  • For more information please refer to your sales partner
  • Controller: Min. pressure difference required for 1400 ln/min (air) < 2 bar
  • Contact your sales partner for other pressure drop requirements
Mounting orientation
  • All orientations are possible
Weight
  • Meter: 3.7 kg, Controller: 8.7 kg (excluding ethernet and fittings)
 

Safety

Test pressure after production
  • 28 bar a
Maximum overpressure sensor
  • Core Sensor: 28 bar a, Prime and Prime H2 Sensor: 90 bar a
Burst pressure
  • Meter: 100 bar a, Controller: 70 bar a
Leak rate < 1 x 10-6 mbar l/s He
Ingress protection class
  • IP54, if IP54-D-sub is used (see accessories tab)
  • For optional EtherCAT/Profinet: IP40
 

Certifications

EMC
  • IEC/EN 61326-1, IEC/EN 61000-6-2/4
ATEX certification
  • None
Material certificates
  • To be released in 2023 (available for meter only)
FDA compliance
  • To be released in 2023 (available for meter only)
PED
  • Fully compliant. Since the unit has 1″ process connection, complies with the SEP, as defined in article 4, paragraph 3 of the Pressure
  • Equipment Directive (PED) (2014/68/EU)
RoHS / REACH
  • All components comply with Directive 2002/95/EC (RoHS) and the REACH guidelines
Warranty
  • 3 years, excluding cases of corrosion
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